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Eco Physics

ENVIRONMENTAL, AMBIENT AIR AND RESEARCH

Target applications are ambient air monitoring, indoor measurement, clean room measurement and atmospheric research.

SEMICONDUCTOR

NOx detection is an innovative approach in CMP (Chemical Mechanical Polishing) process control.

INDUSTRIAL

Typical supported applications are industrial emission monitoring and gas manufacturing control.

AUTOMOTIVE, AVIATION, AND COMBUSTIVE ENGINES

These applications are characterized by demanding sample gas conditions, such as in automotive, aviation, naval, or combustive engine emissions, as well as in catalyst production.

PARAMETERS

ECO PHYSICS produces the widest range of nitrogen oxide analyzers capable of measuring various parameters ranging form 1ppt (parts per trillion) up to 10’000 ppm (parts per million).

Eco Physics by industry

Focuses on low NOX and NOX-related concentrations up to 100 ppm where high resolution is required. Parameters included are NO, NO2, NOX, NH3, NOX-Amines and NOY. Target applications are ambient air monitoring, indoor measurement, clean room measurement and atmospheric research.

NOx detection is an innovative approach in CMP (Chemical Mechanical Polishing) process control. CMP smoothens the wafer surface with a combined chemical and mechanical polishing procedure. During production, wafers are coated by a thin layer. To avoid damage to the wafer surface, for instance by stress cracks, the NOx emitted as soon as the wafer is plane and blank must be measured. Therefore, a high-resolution NOx-detector, capable of determining exactly when the polishing process must be stopped, is essential. This approach is used successfully in manufacturing and development lines worldwide, since 1996.

Focuses on medium NOx, NOx-related and multigas-concentrations up to 5’000 ppm where flexibility is a central requirement. Parameters included are NO, NO2, NOx, NH3, NOx-amines, O2 and CO2. Typical supported applications are industrial emission monitoring and gas manufacturing control.

Focuses on low NOX and NOX-related concentrations up to 100 ppm where high resolution is required. Parameters included are NO, NO2, NOX, NH3, NOX-Amines and NOY. Target applications are ambient air monitoring, indoor measurement, clean room measurement and atmospheric research.

ECO PHYSICS produces the widest range of nitrogen oxide analyzers capable of measuring various parameters ranging form 1ppt (parts per trillion) up to 10’000 ppm (parts per million).

Others Application

Power generation
Particle counters are applied in power generation e.g. for cleanliness control of insulating oil in liquid filled power transformers.
Filter manufacturers
Particle counters are integrated in test rigs of filter manufacturers for filter efficiency verification.
Lubrication
Particle analysis of lubricants enables early detection of failures caused by wear and abrasion.
Test center / research / university
Due to their measuring accuracy and reproducibility, PAMAS particle counters are often used as reference instruments in scientific research.
Component cleanliness
PAMAS particle counters measure component and surface cleanliness according to the standards ISO 16232 and VDA-19.