Eco Physics
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ENVIRONMENTAL, AMBIENT AIR AND RESEARCH
Target applications are ambient air monitoring, indoor measurement, clean room measurement and atmospheric research.
SEMICONDUCTOR
NOx detection is an innovative approach in CMP (Chemical Mechanical Polishing) process control.
INDUSTRIAL
Typical supported applications are industrial emission monitoring and gas manufacturing control.
AUTOMOTIVE, AVIATION, AND COMBUSTIVE ENGINES
These applications are characterized by demanding sample gas conditions, such as in automotive, aviation, naval, or combustive engine emissions, as well as in catalyst production.
PARAMETERS
ECO PHYSICS produces the widest range of nitrogen oxide analyzers capable of measuring various parameters ranging form 1ppt (parts per trillion) up to 10’000 ppm (parts per million).
Eco Physics by industry

Focuses on low NOX and NOX-related concentrations up to 100 ppm where high resolution is required. Parameters included are NO, NO2, NOX, NH3, NOX-Amines and NOY. Target applications are ambient air monitoring, indoor measurement, clean room measurement and atmospheric research.
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Environmental
Eco Physics nCLD 88 Yp
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Environmental
Eco Physics nCLD 899 Y
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Environmental
Eco Physics nCLD AL²
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Environmental
Eco Physics nCLD AL3
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Environmental
Eco Physics nCLD CraNOx II
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Environmental
Eco Physics PAG 003
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Environmental
Eco Physics CLD 780 TR
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Environmental
Eco Physics CON 765
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Environmental
Eco Physics nCLD 66 Y
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Environmental
Eco Physics nCLD 855 CY
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Environmental
Eco Physics nCLD 855 Y
NOx detection is an innovative approach in CMP (Chemical Mechanical Polishing) process control. CMP smoothens the wafer surface with a combined chemical and mechanical polishing procedure. During production, wafers are coated by a thin layer. To avoid damage to the wafer surface, for instance by stress cracks, the NOx emitted as soon as the wafer is plane and blank must be measured. Therefore, a high-resolution NOx-detector, capable of determining exactly when the polishing process must be stopped, is essential. This approach is used successfully in manufacturing and development lines worldwide, since 1996.
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Semiconductor
Eco Physics nCLD EL²
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Semiconductor
Eco Physics nCLD 844 Mh
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Semiconductor
Eco Physics M17
Focuses on medium NOx, NOx-related and multigas-concentrations up to 5’000 ppm where flexibility is a central requirement. Parameters included are NO, NO2, NOx, NH3, NOx-amines, O2 and CO2. Typical supported applications are industrial emission monitoring and gas manufacturing control.
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Industrial
Eco Physics nCLD 822 M
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Industrial
Eco Physics nCLD 822 Mr
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Industrial
Eco Physics nCLD 84 M
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Industrial
Eco Physics nCLD 82 S
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Industrial
Eco Physics nCLD 82 Mh
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Industrial
Eco Physics PAG 003
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Industrial
Eco Physics nCLD EL²
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Industrial
Eco Physics nCLD EL
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Industrial
Eco Physics nCLD EL S
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Industrial
Eco Physics nCLD 855 Y
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Industrial
Eco Physics nCLD 855 CY
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Industrial
Eco Physics nCLD 844 Mh
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Industrial
Eco Physics nCLD 844 M
Focuses on low NOX and NOX-related concentrations up to 100 ppm where high resolution is required. Parameters included are NO, NO2, NOX, NH3, NOX-Amines and NOY. Target applications are ambient air monitoring, indoor measurement, clean room measurement and atmospheric research.
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Automotive
Eco Physics nCLD 811 CM
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Automotive
Eco Physics PAG 003
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Automotive
Eco Physics nCLD EL
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Automotive
Eco Physics nCLD EL S
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Automotive
Eco Physics nCLD 844 Mhr
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Automotive
Eco Physics nCLD 822 SSdhr
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Automotive
Eco Physics nCLD 822 Mhr
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Automotive
Eco Physics nCLD 811 M
ECO PHYSICS produces the widest range of nitrogen oxide analyzers capable of measuring various parameters ranging form 1ppt (parts per trillion) up to 10’000 ppm (parts per million).
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Parameters
Eco Physics nCLD EL
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Parameters
Eco Physics nCLD EL²
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Parameters
Eco Physics PAG 003
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Parameters
Eco Physics nCLD 88 Yp
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Parameters
Eco Physics nCLD 844 Mhr
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Parameters
Eco Physics nCLD 855 CY
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Parameters
Eco Physics nCLD 855 Y
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Parameters
Eco Physics nCLD 899 Y
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Parameters
Eco Physics nCLD AL²
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Parameters
Eco Physics nCLD AL3
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Parameters
Eco Physics nCLD CraNOx II
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Parameters
Eco Physics nCLD EL S
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Parameters
Eco Physics nCLD 82 S
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Parameters
Eco Physics nCLD 84 M
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Parameters
Eco Physics nCLD 822 CMhr
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Parameters
Eco Physics nCLD 822 M
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Parameters
Eco Physics nCLD 822 Mhr
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Parameters
Eco Physics nCLD 822 Mr
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Parameters
Eco Physics nCLD 822 SSdhr
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Parameters
Eco Physics nCLD 844 M
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Parameters
Eco Physics nCLD 844 Mh
Others Application
